Mattson Aspen 2 Refurbish Service
2012-08-27
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We are pleased to annoucenment that we are able to support our customer to refurbish their existing Aspen II systems.
Mattson Aspen II ICP Refurbishment:
A. Replace all consumable parts
B. Replace all o-rings
C. Overhaul and fine tune robot and robot arms
D. Overhaul RF Generators and matching boxes
E. Refurbish shuttle Assy.
F. Add cool down chamber if request
G. Provide two LCD maintenance monitors
H. Replace heater blocks and chamber critical parts
I. Slit door upgrade to be new type
J. Upgrade cassette platform for plastic cassettes if request
K. Refurbish MFCs and Manometers
L. Replace pin lifters with bellows type
M. Replace heater controls with Watlow and Eurotherm controllers
N. Software upgrade
O. Install new type TC if request
Mattson Aspen II ICP Refurbishment:
A. Replace all consumable parts
B. Replace all o-rings
C. Overhaul and fine tune robot and robot arms
D. Overhaul RF Generators and matching boxes
E. Refurbish shuttle Assy.
F. Add cool down chamber if request
G. Provide two LCD maintenance monitors
H. Replace heater blocks and chamber critical parts
I. Slit door upgrade to be new type
J. Upgrade cassette platform for plastic cassettes if request
K. Refurbish MFCs and Manometers
L. Replace pin lifters with bellows type
M. Replace heater controls with Watlow and Eurotherm controllers
N. Software upgrade
O. Install new type TC if request