MATTSON P/N |
Description |
303-23352-00 |
PLUG, GRID CLAMP ANODIZE, A3(second sauce) |
510-18633-00 |
Variable Vacuum Capacitor (ICP Matching box) |
510-08660-00 |
Vacuum Capacitor , 100 pf |
514-05626-00 |
CONT,TEMP/PROCS,HRZ MNT,GRN/R (WATLOW TEMP CONT) |
514-20787-00 |
Over temperature controller (New type) |
544-00024-00 |
TUBE,QUARTZ OEM for Aspen III |
1001464 |
Quartz tube OEM for Suprema |
635-14245-00 |
GREASE, CHRISTO-LUBE 200A, 5OZ |
916-10006-00 |
MINICONVECTRON 275,VCR |
514-04463-00 |
CONT,TEMP,2IN/3OUT,WATLOW 988A |
999-11001-00 |
LUBRICANT,SEALS & VACUUM 109 1 oz |
1001428 |
PAD,ELASTOMER,END EFFECTORS,VACUUM RBT(K#644105) |
1005185 Rev:A |
303-05091-00 |
PADDLE,LONG,A3 (old type) |
1001430 |
PADDLE,LONG,A3(new type) |
304-16239-00 |
Shower Head LP SOURCE, A3 HIGHLAND |
304-16242-00 |
Quartz vessel, Highland(second sauce) |
304-17588-00 |
Quartz Shield, Lo-Temp, A3 (Quartz Shield , Top, Wafer Platen) |
304-17594-00 |
Quartz Shield, Hi -Temp, A3 |
303-05831-00 |
BELLOWS, VATERAL ROTARY |
303-21216-00 |
BELLOWS, LIFT PIN A3 |
303-22112-00 |
BELLOWS, LIFT PIN |
303-22839-00 |
BELLOWS, SLIT VALVE |
1000553 |
BELLOWS ANGULAR SLIT DOOR |
303-07741-00 |
BELLOWS,TOP MOUNT,A3 |
1001064 |
BONNET SEAL VILTON,VAT |