

Please feel free to contact us if any interests. Details TEL OEM P/N Description
1805-220098-11 RING SHIELD T7L5..(85IEM-220)(
1805-220123-11 OUTER FOCUS RING(6)
1805-220135-23 RING,EXH OUTER (EPD)(H6)..(SCC
1805-220177-22 RING,SHIELD (HARD-LD)(H6)
1805-320002-11 HOLDER..QUARTZ,IEM
1805-320109-21 COVER RING OUTER(H6..(SCCM-OX)
1805-320110-31 COVER RING, INNER(H6..(SCCM-OX)
1805-320125-11 COVER RING, INNER (D260)
1805-320126-21 COVER RING OUTER(D260)..(SCCM-OX)
1805-320127-21 BASE RING INTEGRATED(D260)..(SCCM-OX)
1805-320139-11 BASE RING INTEGRATED(HARD-D)(SCCM-OX)
1805-320140-11 COVER RING INNER(D260)..(SCCM-OX)
1805-320141-11 COVER RING OUTER(D260)..(SCCM-OX)
1805-320142-11 BASE RING INTEGRATED(D260)..(SCCM-OX)
1805-350002-11 FOCUS RING,LOW(TYPE L-8.1)
1805-350003-11 COVER RING,INNER(THICK TYPE)
1805-350004-11 BASE RING(THICK TYPE)
1810-121923-11 CEL,(320-T5x5-215-75)
1810-121988-11 ELECTRODE,UPPER(LD-777)
1810-221471-25 ELECTRODE..CRYSTAL,(8K-200)
1810-223596-11 RING..SHIELD,T7,(8K-220-A)
1810-223684-11 ELECTRODE..CRYSTAL,TQM (8K-200
1810-224511-11 RING FOCUS, 8"-NW-2,(8K-ESC)A
1810-224789-11 ELECTRODE..UPPER(75)(T10-215)
1810-225123-11 FOCUS RING, N (HARD-LLD)
1810-327787-11 COVER F/R-C(8N-26-Q)
1810-329157-11 RING,FOCUS INNER OF..COOLING(R
1810-329523-11 FOCUS RING,N(MTBWC250)..(SCCM-
1810-350062-11 FOCUS RING,UP(TYPE L-205)
1D05-200031-11 COVER BAFFLE Q-L3 (DRM2)
1D05-290002-4 DEP SHIELD (U2M)
1D05-290003-4 RING BOTTOM GUARD (84ADV-CD)
1D05-290004-4 RING SHIELD (200-T9-C-N)(84ADV)
1D05-290010-TM ELECTRODE, UPPER, SAP, IEPD
1D05-300040-13 RING..INSULATOR,C(DRM2)
1D05-300052-13 RING..INSULATOR,A7(DRM2)
1D05-300053-14 RING INSULATOR B2(DRM2)
1D05-300067-13 PLATE..UPPER,Q,FLAT(DRM2)
1D05-300133-11 RING INSULATOR LA6.0 (DRM2)
1D05-300148-11 RING INSULATER B3 (DRM2)
1D05-300152-11 COVER..BAFFLE,Q-L,(DRM2)
1D05-300162-11 RING F-8SO-260-6H (DRM2)
1D05-300185-W2 RING INSULATOR A7 (HF1.0) (DRM2)
1D05-300197-11 RING..INSULATOR C-HT120
1D05-300242-11 RING..F-8SO-Q-260-6H(MT90-120)
1D05-300353-11 RING INSULATOR A7 LA6-Q(DRM2)
1D05-300354-11 RING INSULATOR..A7 LA6-8(Q)(DRM2)
1D05-300356-11 RING..F-8S0-Q-260-7H(MT90-120)(DRM2)
1D05-300386C12 RING INSULATOR A7 LA6-6(Q)
1D05-400020-13 WINDOW..BASE,A(DRM2
1D05-400022-14 WINDOW..SHIELD,DEPO(DRM2)
1D10-150001-11 ELECTRODE, UPPER (LD-DH) (HI-TEMP)
1D10-203770-11 UPPER ELECTRODE PLATE (m7-150-.03-Q)
1D10-291355-1 SLEEVE A, UPPER ELECTRODE ACTUATOR
1D10-291525-1 SLEEVE,IEPD, SAP
1D10-313199-11 RING,F-8SO-SI-260-3.4A(DRM2) W
1D10-313300-11 RING F-8S-Si-260-3.4(DRM2)W
1D10-313470-11 RING,F..8SO-SI-260-4A(DRM2)W
1D10-391442-1 WINDOW, UPPER WALL EPD
1D10-391514-1 WINDOW, SAPPHIRE, UPPER WALL
1810-150015-11 ELECTRODE, UPPER (G2L)
1D10-309946-12 FOCUS RING (FOR CERAMIC ESC)
1D05-300188-12 RING INSULATOR A-7 LA4-B (Q) (DRM2)
1D10-390510-TM WINDOW,UPPER WALL EPD
1D10-311775-12 RING F-6S-SI-240-3. 4A
1D05-300190-12 RING INSULATOR A7 LA6-Q(DRM2)
1810-329156-11 RING,FOCUS INNER N..COOLING(RU
1805-320102-12 COVER..RING COOLING F/R(SCCM-O
1805-220159-13 RING,SHIELD T5-240..(M5 TYPE)
1810-221527-13 ATC BELL JAR
1810-221439-25 SI ELECTRODE 150
1810-221470-25 ELECTRODE..CRYSTAL,(8K-180)
1805-320103-12 BASE, RING, COOLING/EXHAUST
1D10-307773-13 RING F-8S-SI-260-4
1D05-400028-22 WINDOW, UP A-2
1D10-310019-13 RING F-8SO-SI-260-4A
1D05-200020-11 SHIELD DEPO QU-A-3
1D05-200033-11 SUPPORT SHIELD DEPO Q-S5
1810-221018-14 RING, SHIELD, T5 (8K-220)
1810-323881-14 INNER FOCUS RING
1805-220124-11 OUTTER FOCUS RING
1810-223798-13 UPPER CEL
1810-328616-12 INNER FOCUS RING
1805-220116-12 OUTER FOCUS RING
1810-224852-12 UPPER CEL
1805-220134-11 SHIELD RING
1810-328662-12 INNER FOCUS RING
1805-420042-11 OUTTER FOCUS RING
1810-222435-11 OUTTER FOCUS RING
1810-327905-11 INNER FOCUS RING
1D10-302209-15 RING, F-8S-SI-260-3.4
1810-222433-11 QUARTZ FOCUS RING
1805-220150-12 RING, SHIELD
1810-221471-24 ELECTRODE..CRYSTAL,(8K-200)
1810-224634-11 FOCUS RING 8-NW-2(8K-ESC)
1810-224633-11 SHIELD RING T7(8K-220)B
ID05-300052-13 RING,,INSULATOR,A7,(DRM2)
1810-250058-11 FOCUS RING, SILICON
1805-320104-11 RING, HOLDER, COOLING, SCCM
1810-320085-12 HOLDER..QUARTZ,IEM
1805-420055-11 PLATE, WINDOW EPD
1810-223147-12 SHIELD RING
1810-324902-11 INNER FOCUS RING
1805-320145-13 ENDPOINT WINDOW
3D05-090003-4 RING, COVER BTM
3D05-090009-2 SHIELD DEPO INNER 150R
3D05-090010-1 RING COVER WALL EX
3D05-090013-3 SHUTTER, INNER QZL
3D05-090022-1 COVER ELECTRODE 2 LINE
3D05-090063-1 WINDOW, CEL , 12MM, NO ANGLE
3D05-090068-1 COVER ELECTRODE, TYPE B
3D05-090072-T1 INSULATOR RING
3D05-090080-3 COVER,BOTTOM, COOLING PLATE
3D05-090085-2 SLEEVE,GAS HOLE,MULTI,WQH
3D05-090086-1 SLEEVE,GAS HOLE,BOTTOM,WQH
3D05-090087-1 SLEEVE,LOWER,COOLING PLATE,WQH
3D05-090106-7 PLATE,INJECT,ATC, 6MM
3D05-090126-1 PLATE, INJECT, ATC, D5D8
3D05-090139-11 FOCUS RING, T5.4, 3P
3D05-100004-12 COVER,ELECTRODE 360 (R/PS)
3D05-200030-12 RING,DEPO SHIELD-EX
3D05-200094-12 RING, SHIELD UPPER 30MM (OX)
3D05-200113-11 RING COVER BOTTOM
3D05-200114-11 ELECTRODE UPPER PLQZ(40)150DEG
3D05-200115-11 COVER, BTM C-QZ
3D05-200116-12 INNER SHUTTER
3D05-200123-11 SHIELD, DEPO QZ-LV
3D05-200137-11 COVER ELECTRODE,SAP SPEC
3D05-200234-11 COVER, SCREW, UEL D424
3D05-250025-11 RING, SHIELD, UPPER, STRAIGHT
3D05-250162-11 FOCUS RING, T8TP
3D05-300007-23 INSULATOR RING
3D05-300007-V3 INSULATOR RING
3D05-300013-11 INSULATOR RING
3D05-300067-11 INSULATOR,ESC ENCLOSURE,T3.5
3D05-300085-12 PLATE, EXHAUST QZ-D30-A
3D05-300086-12 PLATE, EXHAUST QZ-D30-B
3D05-300142-13 INSULATOR,ESC ENCLOSURE(COC)
3D05-300142-V3 INSULATOR,ESC ENCLOSURE(COC)
3D05-300143-11 COVER, BTM R-QZ
3D05-300144-11 COVER, BTM L-QZ
3D05-300162-11 ESC ENCLOSURE INSULATOR RING
3D05-300243-11 COVER RING, 360.9
3D05-300243-V1 COVER RING, 360.9
3D05-390012-1 WINDOW, DEPO SHIELD, FC
3D05-400017-11 WINDOW (EPD)
3D05-400017-V1 WINDOW (EPD)
3D10-200997-11 FOCUS RING,PM,4.0_380(SI)T
3D10-201448-13 FOCUS RING,360-302-C
3D10-201448-13 FOCUS RING,360-302-C
3D10-202489-11 FOCUS RING, 380-T4.0
3D10-202506-11 FOCUS RING, 380-T4.0-303
3D10-302020-11 CEL,OX T10-75-C912 (COC-N)
3D10-250317-21 CEL, OUTER, SH-0.2
3D10-250318-21 RING, FOCUS, AD360-298.1
3D10-250319-21 RING,SPACER,AD340-298.8
3D10-250316-21 CEL, INNER, SH 1.75
3D05-400004-13 GLASS BASE WINDOW-PF
3D05-400004-V3 GLASS BASE WINDOW-PF
3D05-250012-11 INSULATOR, SANDWICH (TE-RP435)
3D05-350010-11 COVER RING 360-364LT (COC)..8.6T
3D05-200133-12 QUARTZ FOCUS RING
3D05-090003-TM RING, COVER BTM
3D05-090009-TM SHIELD DEPO INNER 150R
3D05-090010-TM RING COVER WALL EX
3D05-090013-TM RING, COVER BTM
3D05-090069-11 RING, SHIELD OUTER T4.6
3D10-350067-11 RING,PROTECTION (TE-RP470)
3D05-200174-11 RING SHIELD SCREW HF
3D05-200192-11 FOCUS RING,HK SIO2 302 HF
3D05-200233-12 SHIELD, RING TOP 6P
3D05-200240-11 COVER, ELECTRODE 2LINE 0.6
3D05-200247-11 SHIELD DEPO,INNER HIGH-K
3D05-300008-12 INSULATOR,ESC ENCLOSURE
3D05-300008-V2 INSULATOR,ESC ENCLOSURE
3D05-300198-11 RING SHIELD OUTER QZ
3D05-300198-V1 RING SHIELD OUTER QZ
3D05-350020-11 COVER,RING FBI LV
3D10-250182-11 RING, SI GND FBI
3D10-250203-11 RING, GND GROOVE, FG8
3D10-250203-V1 RING, GND GROOVE, FG8
3D10-250560-11 RING, FOCUS, SILICON
3D10-350401-11 FOCUS RING, 302-303TP T8.6 LV
3D05-200172-11 FOCUS RING COVER T2 LOCATE HF
3D10-250281-11 FOCUS, RING, J302-8.3-298.2
3D10-253020-11 CEL, OX T10-C912
3D10-250322-11 FOCUS RING 360-305-LT298.4-1.0
3D10-250157-11 FOCUS RING 380 - T6.5 (CP)
3D10-201448-21 FOCUS RING,360-302-C (SSP)
3D10-201448-12 FOCUS RING,360-302-C
3D10-450079-11 BUSHING, UEL
3D10-450080-11 SCREW, UEL
3D10-403370-11 SCREW, CEL
3D10-403371-11 WASHER, CEL
3D10-450071-13 PIN, LOCATE
3D10-250398-11 RING, SI GND FBI 2(JI-B)
3D87-003411-14 CEL, OX T10-75-C912 (COC-N) ASSEMBLY
3D87-052667-11 CEL, OX T10-C912 ASSEMBLY
3D05-400016-V1 GLASS,BASE WINDOW,EPD
3D05-400019-V5 WINDOW,SHIELD DEPO(DRM2)
3D10-250079-V1 RING,BTM SHIELD,SI-OUT
3D05-200142-V2 RING SHIELD SCREW QZ
3D05-350006-V1 INSULATOR RING,CD
3D05-350027-V1 INSULATOR RING,FG8
3D05-350028-V1 INSULATOR,ESC ENCLOSURE,FG8
3D05-300277-V1 RING, INSULATOR, 360, HF 15
3D05-300233-V2 SHIELD, RING, TOP
3D05-150029-V1 COVER ELECTRODE 328
3D10403380-11 Screw, CEL Holder (P)
3D10403381-11 Bush, CEL Holder (P)
3D10-250871-11 CEL, OX T10-73-C912 C
3D10-250899-11 RING,FOCUS 8.3-302-T
3D05-300257-11 INSULATOR, ESC ENCLOSURE 9 (COC)
3D10-250133-11 FOCUS RING, 360-305-LT-8.6
3D05-250036-11 UNDER FOCUS RING 298-LT-8.1
3D10-250197-11 FOCUS RING L6-5.8-LT-R
2105-220853-51 QUARTZ CAP COVER
3D05-250056-11 COVER, ELECTRODE 2LIN
3D10-451552-11 BUSH, CEL HOLDER
3D10-451551-11 BUSH, CEL HOLDER
3D10-451550-11 CEL BUSH
3D10-450958-11 WASHER SCREW
3D10-450972-11 WASHER SCREW
3D10-451554-11 SCREW CEL SE SUS
3D10-451553-11 SCREW CEL SE SUS
032-450958-11 WASHER SPRING
032-000847-1 WASHER SPRING
3D10-202372-11 RING, PROYECTION (TE GND FLAT)
3D10-202375-12 OUTER RING (TE-349-LABY-FLAT)
3D10-202364-12 CEL, INNER (TE-T10-P-LABY)
3D10-250012-Z1 CEL, INNER (TE-LABY304)
3D10-250639-21 FOCUS RING, SUPER DRM
3D10-351315-12 UE PLATE (INNER), SUPER DRM
3D10-250675-11 UE OUTER TOP, SUPER DRM
3D87-051217-13 CEL ASSY,VDC
3D10-451115-11 RING,CEL BUSH 1PUG
3D10-451116-11 BUSH,CEL HOLDER 1P30R
3D10-450309-11 SCREW,CEL SE VDC L28.2
3D05-250102-11 RING (QZ-ATCC), FOCUS POLY
3D05-250106-12 INSULATOR ENCLOSURE
3D05-250098-11 COVER, ELECTRODE DOME FQ
3D05-450007-11 SLEEVE, EDP LOW
3D05-350050-11 NOZZLE, DOME INNER, 2 GAS FQ
3D05-250096-11 NOZZLE, DOME OUTTER
3D05-250052-12 RING SHIEL CORNER (DEF)
2L05-250039-11 UEL QT POLY (N)
2L05-250001-12 RING FOCUS POLY (N)
3D05-350019-11 UNDER QZ FR,FEC-C.R.-0.5
