LAM Consumable Parts
All LAM OEM quartz ware are available now.Any interest please let us know. Details
| 716-004655-001 | RING Quartz Upper |
| 716-443217-002 | UPPER RING, CERAMIC |
| 716-140236-003 | RING, CONFNMT |
| 716-028454-015 | QUARTZ DISK |
| 716-011543-001 | PLATE WAFER CLAMP ATTACH, CERAMIC |
| 716-331088-001 | RING, EDGE 8", ESC NOTCHED, TOP, QUARTZ |
| 716-011830-006 | FOCUS RING, 6"(ALUMINA) W/C |
| 716-331089-001 | R, EDGE 8" E S, BOT CER |
| 716-330915-001 | INSUL, ESC, 9600XX |
| 716-011009-001 | WINDOW QUARTZ |
| 716-031052-002 | WDO QTZ HTD ENDPOINT |
| 716-028454-012 | QUARTZ DISK |
| 716-330355-003 | WINDOW ENDPOINT DETECTOR, 9600 SE ALLIANCE |
| 716-021717-002 | JAR, BELL, SLEEVE, ISOTROPIC ETCH |
| 716-330045-002 | R, Edge 8" MAJ FL, ESC, VAR GAP |
| 716-330760-002 | Clamp, Ceramic Ring BSR |
| 716-443083-004 | RING, CONFINEMENT, TOP, EXEL |
| 716-443084-003 | RING, CONFINEMENT, BOTTOM, EXEL |
| 716-031052-001 | WINDOW, QUARTZ, HEATED ENDPOINT |
| 716-140236-062 | RING, CONFINEMENT, MODULAR QUARTZ |
| 716-21323-002 | FUNNEL QUARTZ STRIPPER |
| 716-011493-001 | SPACER, QUARTZ, MODULE |
| 716-140236-002 | RING, CONFINEMENT, MODULAR, QTZ |
| 716-140432-002 | UPPER QUARTZ, KEYED |
| 716-443090-002 | RING QUARTZ UPPER |
| 716-020905-001 | RING FILLER, LWR WAFER CLAMP |
| 716-331157-015 | DISK, INTERFEROMETER, BOT GAS |
| 716-011427-001 | DISK, QUARTZ, MECH.POLISH |
| 716-160255-002 | BELL JAR, SLEEVE |
| 716-008645-001 | RING, QUARTZ, WITH STEP |
| 716-007136-002 | RING, 3 HOLES .080 |
| 716-443234-002 | RING, FOCUS, QUARTZ, HP PLUG |
| 716-016394-001 | CONFINEMENT, RING |
| 716-402452-003 | QUARTZ, D-SHAPED RING WITH .145 STEP |
| 716-005204-001 | RING WAP SMALL 10.35 ELCTD DFC |
| 716-801628-002 | LINER BOT ELCTD 300MM STPR |
| 716-013344-001 | RING COVER OUTER GND |
| 716-002174-002 | BASE FOC R CVR DFC 200MM W GND PLT |
| 716-016763-001 | RING FILLER INV STEP DFC 200MM |
| 716-011624-010 | RING INSLTR LWR ELCTD RDUCED HGHT LOW CAP |
| 716-331142-001 | R EDGE TOP WIDE |
| 716-443179-102 | RING EDGE BASE |
| 716-015590-001 | RING H EDGE NARROW SINGLE CRYSTAL |
| 716-802779-001 | INJECTOR CENTER COLLIMATOR MOUNTING QUARTZ |
| 716-801667-003 | WIN QTZ |
| 716-540198-001 | E1 -- WINDOW FUSED SILICA |
| 716-330915-003 | Rev A -- SLEEVE INSULATING ESC-LOW CAPACITANCE |
| 716-330915-003 | Rev C -- SLV INSUL ESC-LOW CAP (QUARTZ) |
| 716-140139-212 | RING HOT EDGE HI WALL ESC 8" |
| 716-443086-001 | E1 RING HOT EDGE HI WALL ESC 8" |
| 716-140139-213 | E1 RING HOT EDGE HI WALL ESC 8" Si |
| 716-021323-001 | FUNNEL QUARTZ |
| 716-443086-401 | HOT EDGE RING |
| 716-331157-022 | DISK, INTERFEROMETER, BOT GAS |
| 716-331142-005 | R EDGE TOP WIDE |
| 716-027966-001 | QUARTZ COVER RING |
| 716-027963-002 | RING, WAP, GEN, SLTD, 12.51 |
| 716-040908-003 | RING, WAP, HOT,SLTD, 200MM |
| 716-443086-301 | E1 RING HOT EDGE HI WALL ESC 8" |
| 716-039962-001 | RING,H EDGE,SI,H NARROW WALL,8 IN |
| 716-039961-001 | RING,FOC,STEPPED,FILLER,200MM |
| 716-005205-003 | PL, CVR, STEP, QTZ, 20MM, 2300EXEL |
| 716-016831-007 | RING, WAP, QTZ GENERIC, 200MM, 2300 |
| 839-017612-010 | ENDPOINT, QTZ. W/ SAPPHIRE WINDOW |
| 839-011907-334 | UPPER ELECTRODE |
| 839-015480-003 | ASSY, UPPER ELCTD, .28STEP, TC 200MM |
| 716-331157-014 | DISK, QUARTZ |
| 716-007136-010 | UPP QTZ RING |
| 716-008645-004 | QUARTZ COVER RING |
| 716-016394-010 | CONFINEMENT, RING |
| 716-331142-201 | R,EDGE,TOP,WIDE,NSG |
| 716-800951-201 | BASE,FCS R, SHLD, 200MM |
| 716-000941-001 | PL, PLASMA DISTR |
| 716-140139-211 | 60 DEGREE HOT EDGE RING |
| 716-443090-010 | QUARTZ UPPER RING |
| 716-443230-002 | CONFINEMENT, RING |
