Novellus OEM parts for sale
We are able to supply many Novellus OEM parts.If you have any questions, please let us know. Details Novellus
OEM P/N Description
15-032939-00 MOER RING, 2.25MM
15-054434-01 MOER RING, 3.00MM
15-110411-00 SAPPHIRE WINDOW
06-2794 TUBE, PLASMA
15-032014-01 WINDOW SAPPHIRE COATED
06-2545 SPOOL PLASMA QUARTZ PEP-1
16337-01 COLLAR QUARTZ 1.25" HOLE
14738-01 BUBBLER QUARTZ
17688-01B PLATE GAS DISTRIBUTION QUARTZ 8"
16532-01 PLATE LAMP QUARTZ
15367-01 QUARTZ PIN
71805-01 QUARTZ WINDOW
06-2640 SPOOL PLASMA
17622-01 LAMP, QUARTZ DIFFUSER
16531-01 LAMP, QUARTZ DIFFUSER GUIDE
06-2704 GAS DISTRIBUTION PLATE
06-2706 COLLAR QUARTZ
06-2679 SPOOL QUARTZ
06-2694 PLASMA CHAMBER
16784-01 QUARTZ ELBOW SPOOL
06-0091 CHAMBER PLASMA QUARTZ 4mm
16783-01 CHAMBER QUARTZ 3500
16337-02 QUARTZ COLLAR w/ 1" HOLE I3500 ONLY
17622-01 PLATE, DIFFUSER, 4"
06-2447 PIN, MUSHROOM, COOLING CHUCK
15380-01 STANDOFF, CERAMIC
16209-01 IMSULATOR, ALIGNMENT POST, CERAMIC
17621-01 PLATE GAS DISTRIBUTION QUARTZ 6"
16359-01 CHAMBER PLASMA QUARTZ
15-120150-03 INJECTOR, TUBE, CERAMIC
10-363935-00 TUBE, QUARTZ
15-032939-00 MOER RING, 2.25MM
15-054434-01 MOER RING, 3.00MM
15-110411-00 SAPPHIRE WINDOW
15-032014-01 WINDOW SAPPHIRE COATED
06-2545 SPOOL PLASMA QUARTZ PEP-1
16337-01 COLLAR QUARTZ 1.25" HOLE
14738-01 BUBBLER QUARTZ
17688-01B PLATE GAS DISTRIBUTION QUARTZ 8"
16532-01 PLATE LAMP QUARTZ
15367-01 QUARTZ PIN
71805-01 QUARTZ WINDOW
06-2640 SPOOL PLASMA
17622-01 LAMP, QUARTZ DIFFUSER
16531-01 LAMP, QUARTZ DIFFUSER GUIDE
06-2704 GAS DISTRIBUTION PLATE
06-2706 COLLAR QUARTZ
06-2679 SPOOL QUARTZ
06-2694 PLASMA CHAMBER
16784-01 QUARTZ ELBOW SPOOL
06-0091 CHAMBER PLASMA QUARTZ 4mm
16783-01 CHAMBER QUARTZ 3500
16337-02 QUARTZ COLLAR w/ 1" HOLE I3500 ONLY
17622-01 PLATE, DIFFUSER, 4"
06-2447 PIN, MUSHROOM, COOLING CHUCK
15380-01 STANDOFF, CERAMIC
16209-01 IMSULATOR, ALIGNMENT POST, CERAMIC
17621-01 PLATE GAS DISTRIBUTION QUARTZ 6"
16359-01 CHAMBER PLASMA QUARTZ
15-120150-03 INJECTOR, TUBE, CERAMIC
10-363935-00 TUBE, QUARTZ
