AXCELIS OEM parts for sale
We sell AXCELIS OEM quartzware , please let us know if you are interest in it.
Details
AXCELIS OEM P/N Description281401 TUBE, QUARTZ, MCU
47402 Plate, fused quartz
47404 Plate, fused quartz
477311 Baffle plate, 8inch, with standoff
477974 Baffle plate
428451 ORIFICE, ES3 CHAMBER
609091 WINDOW, ES3 LOWER
280861 Pin Quartz process chamber 200 MCU
539291 Bullet quartz
615282 Disk, quartz, baffle 200mm, 0.25 thru holes
631481 Baffle, upper, sml disk, 300 turbo
635551 Baffle, quartz lower, sml, 300mm
653901 Baffle, upper, sml disk, 300 turbo
682231 TUBE, QUARTZ
684161 TUBE, STRAIGHT QUARTZ
1002-67722 QUARTZ FOR CLEANING
412970 SHIELD SAPPHIRE COATED
478290 SHOWER HEAD, UPPER ES PRCS CHAMBER
405231 PIN, SAPPHIRE
412961 Disk, Sapphire
609081 ORIFICE-QUARTZ, VACUUM CHAMBER
621551 SAPPHIRE WINDOW
0992-60573 SAPPHIRE TUBE
47403 Plate, fused quartz
47405 Plate, fused quartz
47406 Plate, fused quartz
280241 Window heater process chamber 200 MCU
280242 Window heater process chamber 200 MCU
280243 Window heater process chamber 200 MCU
280251 Shower head process chamber 200 MCU
280252 Shower head process chamber 200 MCU
280781 Spcr-shower-head process chamber 200 MCU
280811 Upper shr hd qtz process chamber 200 MCU
280812 Upper shr hd qtz process chamber 200 MCU
280862 Pin Quartz process chamber 200 MCU
280891 Spacer, upper process chamber 200 MCU
286151 Distribitor plate 8inch zehpyr
392171 Sapphire tube one inch
392172 Sapphire tube one inch
392173 Sapphire tube one inch
396041 Quartz cooling tube
405241 Window heater, sapphire, coated
405243 Window heater, sapphire, coated
412971 Shield, sapphire, coated
428451 Orifice-quartz, vacuum chamber
428452 Orifice-quartz, vacuum chamber
428461 Window-quartz, lower, process chamber
428462 Window-quartz, lower, process chamber
463601 Plate fused Quartz, 300mm irradiator
463601 Plate, fused quartz 300mm irradiator
463602 Plate fused Quartz, 300mm irradiator
463602 Plate, fused quartz 300mm irradiator
472811 Baffle, cooling, heater window
477311 Baffle plate, 8inch, with standoff
477312 Baffle plate, 8inch, with standoff
477313 Baffle plate, 8inch, with standoff
477314 Baffle plate, 8inch, with standoff
477971 Baffle plate
477972 Baffle plate
477973 Baffle plate
477974 Baffle plate
477975 Baffle plate
478291 Shower head , upper es prcs chamber
478292 Shower head, upper es prcs chamber
478401 Upper shower head shielded, process chamber
478402 Upper shower head shielded, process chamber
483421 Tube, quartz plasma es3
487961 Shower head, upper process chamber GLP
487962 Shower head, upper process chamber GLP
559521 Windwo-quartz lower, process chamber
559522 Windwo-quartz lower, process chamber
560631 Ring, shower lock, quartz, process chamber, plasma asher
566951 Nut special
570741 Sapphire plasma tube single cavity tunable source
585501 Baffle plate, intel, (copy exact)
588271 Orifice plate, es3i
595281 Heater window, lower, process chamber es3lk
602271 Orifice window, universal, loadlock, es3i
602272 Orifice window, universal, loadlock, es3i
609091 Window - quartz lower, process chambers
615281 Disk, quartz, baffle 200mm, 0.25 thru holes
615283 Disk, quartz, baffle 200mm, 0.25 thru holes
617161 Shower head, upper process chamber GLP
648151 Tube, source, quartz, outer 27mm id
652251 Tube, straight quartz
657741 Pin Quartz process chamber
657742 Pin Quartz process chamber
657743 Pin Quartz process chamber
695341 Disk, quartz, baffle 3/16 ctr hole
0669-60684 Baffle, upper, qtz, 300mm
0992-60519 Disk, saphhire, baffle 200mm, 0.25 thru holes
0992-60573 Tube, straight sapphire
0992-60607 Baffle qtz, upper, sap, sml chamber
0992-60617 Tube, straight quartz
0992-60626 Baffle lower, II, sml, chamber
0992-60628 Baffle, quartz lower, sml, 300mm
0992-60651 Baffle, upper, sml disk, 300 turbo
0992-60688 Tube, source quartz outer cooling source
0992-60698 Baffle, upper, qtz opt 208sc
0992-60699 Pin, wafer, 2.067 lg
TL_652251 Quartz plasma tube single cavity tunable source
47401 Plate, fused quartz
615281 DISK, QTZ BAFFLE M0.25 THRU HOLES
635551 LOWER QTZ BAFFLE SML 300 TURBO PLATE SLOTTED
631481 BAFFLE UPPER SMAL;L DISCK 300 TURBO
