AMAT Parts for sale
Origin : USAWe provide AMAT OEM consumable parts.
If any question, please let us know.
Details AMAT OEM P/N Description
0020-00846 GLASS 4" VIEWPORT
0020-01021 PLATE QUARTZ
0020-03366 QUARTZ VIEWPORT SHIELD
0020-03398 INSULATING PIPE QUARTZ
0020-03459 GLASS VIEWPORT
0020-04058 RING PEDESTAL Si 200MM OXIDE
0020-04059 WINDOW DYNASIL 1000
0020-04074 WINDOW
0020-06315 GLASS 3.6" VIEW PORT
0020-20439 VIEWPORT COVER BUFFER/ORIENTER
0020-20499 WINDOW PROTECTIVE
0020-21753 FINGER 6" PRECLEAN CHAMBER
0020-22906 PIN PRECLEAN PEDESTAL
0020-23354 QUARTZ INSULATOR 8" ABC&D PRECLEAN
0020-24018 PIN POLY SI QUARTZ INSULATOR
0020-24099 INSULATOR QTZ 6" SMF PRECLEAN
0020-24100 INSULATOR QTZ 8" PRECLEAN II PTN ABC&D
0020-24435 INSULATOR QTZ 8" JMF
0020-24438 INSULATOR QTZ 6" SMF
0020-31918 PLUG DC ESC RECESSED SIC
0040-20284 BELL JAR PRECLEAN
0040-20561 BELL JAR PRECLEAN
0040-21178 BELL JAR PRECLEAN II
0040-21226 BELL JAR PRECLEAN INTEL CLEAN
0200-00006 INSULATOR GROUND-PLATE
0200-00012 RING QTZ 5
0200-00015 COVER QUARTZ 5
0200-00018 COLLAR PEDESTAL 4" OX/MLR (REG)
0200-00036 RING COVER RIM 4,5,6 OXIDE
0200-00038 RING CLAMPING 100MM RIGID 3/16
0200-00042 COVER QTZ 4 POLY .40 THK
0200-00043 COVER QTZ POLY 150MM
0200-00055 RING QTZ COVER 200MM OXIDE
0200-00057 WINDOW SMALL HOLE
0200-00058 GAS RING SM. HOLES & CHANNELS
0200-00059 COVER QUARTZ 6, DF
0200-00068 CLAMPING RING 200MM OXIDE 187 THK
0200-00070 RING QUARTZ 8 EXT DC
0200-00071 INSULATING PIPE QTZ 200MM EXT
0200-04180 COVER QTZ 8 EXT
0200-09002 WINDOW SLIT CVD CHAMBER
0200-09005 WINDOW
0200-09024 SMALL WINDOW
0200-09025 TUBE GAS FEED
0200-09035 PIN, WAFER LIFT 6"
0200-09054 PLATE GAS XTAL
0200-09062 COVER RING SPUTTER 6
0200-09072 SHIELD 200MM
0200-09074 WINDOW HEATER 200MM
0200-09082 SHIELD 200MM SPUTTER ETCH
0200-09083 SHIELD 150MM SPUTTER ETCH
0200-09086 QUARTZ RING 200MM SPUTTER ETCH
0200-09087 RING QTZ THK 150MM SPUTTER ETCH
0200-09090 RING GRAPHITE 200MM SPUTTER/ETCH
0200-09121 SHIELD, 4,5,6 WB, Ceramic
0200-09129 INSULATOR BWCVD 200mm WB
0200-09158 WINDOW HEATER CVD CHAMBER
0200-09177 200MM WRAP AROUND COVER QUARTZ
0200-09179 INSULATING PIPE QUARTZ
0200-09187 COVER QUARTZ 8 EXT POLY 4.4MM
0200-09190 GAS RING 96 HOLES
0200-09196 PLATE GAS DISTR UPPER QUARTZ
0200-09197 PLATE GAS DISTR LOWER 6.5" OD 4-6" QTZ PRSP
0200-09199 TUBE PLASMA QUARTZ .25"INLET W/
0200-09201 PLATE GAS DISTR LOWER 8.5"OD 8"QTZ
0200-09214 RING PEDESTAL 4" METAL ETCH CHAMBER
0200-09216 RING PEDESTAL 6" METAL ETCH CHAMBER
0200-09217 RING QTZ 8" EXT CATH METAL NOTCHED
0200-09221 RING QTZ 8" EXT CATH METAL FLAT
0200-09222 RING EXTERNAL QUARTZ 8"
0200-09242 PLUG DC GRAPHITE CR VERSION POLY
0200-09243 COVER PEDESTAL QTZ 8" EXT CATH WF
0200-09246 COVER 8" WRAPAROUND UMBRELLA OXIDE
0200-09270 ANGLE TC SUPPORT QTZ PRSP
0200-09312 WINDOW QUARTZ SMALL
0200-09336 PLATE GD 200 MM PRSP
0200-09338 CAP TOP GD 200 MM PRSP
0200-09346 COVER WRAPAROUND QTZ OXIDE
0200-09347 COLLAR SI OX/MLR/NIT 150MM FLAT
0200-09349 CLAMP QTZ OX/MLR/NIT 150MM FLAT
0200-09384 PIN WAFER LIFT UNIVERSAL CHAMBER, 150mm
0200-09405 SHIELD COMMON SILANE 200MM
0200-09412 WINDOW HEATER 100-150MM STEPPED
0200-09416 RING CLAMP OX/MLR/NIT 200MM
0200-09422 RING FOCUS QTZ ALUM 200MM
0200-09425 RING FOCUS QTZ ALUM 200MM 1.09 HTFL
0200-00148 TUBE PLASMA 25MM APPLICATOR ASP
0200-09444 CAP TOP QTZ 25MM TUBE ASP
0200-09445 LINER QTZ U
