Mattson Aspen 2 Parts for Sale
Mattson Consumable and Non-consumable parts.If there is any Mattson parts need, please contact us in any time.
We can provide most of Mattson parts with OEM quality. Details
| RF matching box,ICP | 914-92003-00 |
| RF matching box,Diode | 553-00098-00 |
| RF matching box,Triode | 934-15016-RW |
| RF coil | 263-06185-00 |
| RF coil support white 1 | 544-00032-01 |
| RF coil support white 2 | 544-00032-02 |
| RF coil support white 3 | 544-00032-03 |
| RF coil support white 4 | 544-00032-04 |
| RF coil support white 5 | 544-00032-05 |
| RF coil support white 6 | 544-00032-06 |
| RF coil support white 7 | 544-00032-07 |
| RF coil support white 8 | 544-00032-08 |
| Capacitor 50 PF | 235-15635-00 |
| Capacitor 100 PF | 510-08660-00 |
| Vaccum Capacitor Strape (new type) | 302-08852-00 |
| Coil support(new type) | 301-08506-00 |
| Screw(short) | 915-10013-00 |
| Screw (long) | 915-10056-00 |
| Vacuum Capacitor (For Matching box) | 510-18633-00 |
| Capacitor 100 PF KIT(without screw) | 235-15635-00 |
| SCREW,M4*10MM | 910-10013-00 |
| SCREW,M4*12MM | 910-10056-00 |
| Spliter (Diode,Triode) | 580-00097-00 |
| RFPP generator | 042-00012-00 |
| ADTEC generator | 529-14359-00 |
| BRKT,ADTEC RF Generator | 199-10002-00 |
| Retrofit kit for upgrade Adtec generator | 235-14601-00 |
| ADTEC generator cable side a | 560-12135-01 |
| ADTEC generator cable side b | 560-12135-02 |
| ADTEC generator cable back a | 560-12135-03 |
| ADTEC generator cable back b | 560-12135-04 |
| ENI RF generator OEM-12B | 529-01022-00 |
| ENI RF generator cable 100 feet | 182-74000-00 |
| ENI RF generator cable 19 feet | 182-74000-01 |
| ENI RF generator cable 36 feet | 182-74000-02 |
| ENI RF generator cable 60 feet | 182-74000-03 |
| ENI RF generator cable 12 feet | 182-74000-04 |
| plasma detec sensor cable p1 | 182-87000-02 |
| plasma detec sensor cable p2 | 182-87000-03 |
| plasma detec sensor cable p3 | 182-87000-04 |
| plasma detec sensor cable p4 | 182-87000-05 |
| rf interlock | 932-12008-00 |
| rf interlock | 932-12009-00 |
| BUSHING, INSULATOR | 245-00004-00 |
| Grid(thick) | 544-00014-00 |
| Grid (thin) | 544-00016-00 |
| Guide ring | 544-00015-00 |
| screw(Grid) | 475-00510-11 |
| screw(Guide ring) | 475-01820-01 |
| Screw washer(for Guide ring) | 497-00477-06 |
| Quartz o-ring | 456-09610-02 |
| Quartz tube | 544-00024-00 |
| FARADAY SHIELD | 544-00034-00 |
| FARADAY SHIELD SCREW | 475-00510-05 |
| SHOWER HEAD | 303-03552-00 |
| SHOWER HEAD SCREW | 475-00510-00 |
| SHOWER HEAD SCREW WSHR | 497-00477-06 |
| SHOWER HEAD GAS LINE TUBING | 544-00019-00 |
| CM VAVLE (NURPO VALVE) | 914-11003-00 |
| PWR STRIP,60UTLET,15 CRD ,MOD | 305-12626-00 |
| Grid (for Triode) | 199-60001-00 |
| Distribution head (for Diode) | 145-01002-00 |
| Exten guide ring (For Winbond) | 303-01720-00 |
| Support guide ring(For Winbond) | 303-04715-00 |
| HIRSCH(For Winbond) | 303-04716-00 |
| Lift pin assembly(New type) | 263-01204-00 |
| Lift pin bellow | 258-08908-00 |
| Lift pin cylinder | 400-13711-00 |
| Lift pin cylinder t-seal | 913-12004-00 |
| Lift pin | 062-00003-00 |
| Needle Valve | 914-14003-00 |
| Lift pin up/down sensor + cable B/C | 182-23000-01 |
| Lift pin up/down sensor + cable S/C | 182-23000-02 |
| ASY.ONE PIECE SHOWER HEAD, STD | 263-13414-00 |
| Heater Block (new style) | 303-06259-00 |
| Heater Block (Winbond) | 162-00001-00 |
| Thermocouple | 916-11001-00 |
| thermocouple Ceramic tube | 916-11002-00 |
| thermocouple tubing | 305-06896-00 |
| thermocouple fitting ultra torr body modif | 044-00006-00 |
| Fitting (for Thermocouple) | 913-10025-00 |
| Fitting O-Ring | 913-10039-00 |
| Thermocouple o-ring | 456-00226-94 |
| Pusher,Heater | 062-00021-00 |
| Pusher,Heater screw | 475-12314-05 |
| Pusher,Heater screw washer | 497-01395-04 |
| Thermostat | 514-02755-00 |
| Heater element (120v) | 533-17226-00 |
| Strap | 303-08253-00 |
| Strap Ground | 062-00023-00 |
| Heater fuse 20A | 932-22011-00 |
| Heater fuse 20A holder | 932-22002-00 |
| Heater SSR 25A | 931-15001-00 |
| HEATER jacket OF THROTTLE VLV | 533-03366-00 |
| HEATER jacket LANKET OF ISOLATION | 533-02735-00 |
| Switch,Vacuum(old type) | 916-10003-00 |
| 20 torr switch | 483-12068-00 |
| 100 torr switch(new type) | 483-13911-00 |
| Window,Process Chamber | 144-00003-00 |
| View port o-ring | 456-01027-01 |
| Iso valve | 914-11002-00 |
| Iso valve o-ring | 456-01027-26 |
| Iso valve o-ring(white color) | 456-04229-04 |
| Chamber o-ring | 456-01027-03 |
| Throttle valve | 914-11001-00 |
| Electric Feedthrough | 144-01000-00 |
| MFC O2 10SLM STEC 7440 | 445-03706-00 |
| MFC CF4 100 SCCM stec7440 | 445-13230-00 |
| MFC CF4 100 SCCM stec7330 | 445-03544-00 |
| MFC CF4 200 SCCM stec 7330 | 445-06853-00 |
| MFC N2 1SLM SCCM stec 7440 | 445-04230-00 |
| MFC O2 10SLM STEC 7340MC(Winbond-5) | 445-03546-00 |
| MFC CF4 200 SCCM stec 7330MC(Winbond-5) | 445-08615-00 |
| MFC N2 1SLM STEC 7330MC(Winbond-5) | 445-03545-00 |
| MFC O2 10SLM AERA 981SBC,10RA | 445-08618-00 |
| MFC CF4 200 SCCM AERA 980C | 445-13558-00 |
| MFC CF4 100 SCCM STEC. | 445-03554-00 |
| MFC N2 1SLM SCCM AERA 980C | 445-02425-00 |
| Stec MFC cable (type:CA-FH-2) | 934-18010-00 |
| COVER,GAS DISTRIBUTION | 145-01001-00 |
| PLATE,GAS DISPERSION | 145-01002-00 |
| MKS gauge 20 torr | 575-12139-00 |
| CHAMBER REFERENCE MANOMETER 20 TORR | 575-03550-00 |
| Tylan gauge 10 torr | 575-04928-00 |
| Nupro valve | 914-11003-00 |
| ICP plasma sense detector | 299-20000-00 |
| Manifold penu, 4 port (gas EV) ,Gas EV valve | 914-14016-00 |
| Slit door cylinder | 914-18004-00 |
| slit door cylinder c-ring | 912-16003-00 |
| Slit door cylinder rod end | 053-00015-00 |
| Slit door assembly (New design) | 263-08738-00 |
| Slit door spring(L spring) | 153-00002-00 |
| Slit door spring(U spring) | 302-06607-00 |
| Slit door o-ring | 456-01027-09 |
| Slit door t-seal | 913-12003-00 |
| Housing upper | 456-00226-16 |
| Housing middle | 913-10029-00 |
| Housing lower | 913-10030-00 |
| Slit door housing | 303-08725-00 |
| Slit door quad seal (New) | 456-08727-01 |
| Robot , Assy, Aspen II | 263-08980-00 |
| paddle on wafer sensor | 190-25000-00 |
| wafer sensor | 263-05984-01 |
| wafer sensor | 263-05984-02 |
| wafer sensor | 263-05984-03 |
| wafer sensor | 263-05984-04 |
| wafer sensor | 263-05984-05 |
| Bushing | 301-08586-00 |
| Robot extension (sensor+cable)1 | 280-23000-02 |
| Robot extension (sensor+cable)2 | 280-23000-03 |
| Robot extension (sensor+cable)3 | 280-23000-04 |
| lift home sensor | 280-23000-01 |
| Grease reservoir | 301-08585-00 |
| Housing | 456-09062-00 |
| Quad seal | 456-08727-02 |
| Grease | 635-08804-00 |
| Linkage(T-Drop) | 040-00031-00 |
| Shaft(Mount on Linkage) | 040-00027-00 |
| Bearing 1.500*1.875*1.875 | 910-10029-00 |
| Bearing 1.000*1.375*1.875 | 910-10028-00 |
| Bearing 0.250*0.625*0.196 | 910-10030-00 |
| Bearing 0.375*0.875*0.218 | 910-10027-00 |
| Bearing Flange 0.250*0.625*0.196 | 910-10020-00 |
| Bearing CRS RLR,SPLT OTR, W/SLS | 405-01164-00 |
| Spring washer | 912-14004-00 |
| Robot rotate gear (small, just for turbo system) | 430-14998-00 |
| CBL,J1,Robot interface ext | 263-00521-00 |
| Step Motor | 551-02933-00 |
| Robot dc motor exten & rotation | 263-02156-00 |
| Robot motor Gear ,Small extend | 911-10005-00 |
| Robot motor Gear ,Small rotation | 911-10007-00 |
| Robot extension&rotation,86Ncm | 933-14007-00 |
| Robot arm | 139-00000-00 |
| Robot brake | 933-17001-00 |
| Main interface PCB | 280-90000-00 |
| Second interface PCB | 255-00568-00 |
| Compumotor | 520-04612-00 |
| Paddle (both side one screw) | 303-01425-00 |
| Paddle o-ring | 913-10066-00 |
| Paddle (both side two screws total 6 screws) | 263-02689-00 |
| PADDLE/BRKT ASY,ADJUST,STRIP | 263-02689-00 |
| CPU PCB (Celeron 366 MHZ 128M RAM) | 559-14610-00 |
| CPU PCB (486dx2) | 934-17010-00 |
| CPU pcb (133 MHZ) | 559-08638-00 |
| PCA,Operator Interface | 255-06515-00 |
| Motor control board | 246-92000-00 |
| Primary interface board | 246-91000-00 |
| Digital I/O card | 165-90000-00 |
| Stepper motor card | 934-17003-00 |
| Analog input board | 559-12929-00 |
| Analog output board | 559-12711-00 |
| Analog filter board | 146-93000-00 |
| Terminal panel | 246-90000-00 |
| SMIF BOARD | 255-00233-00 |
| Main breaker | 933-12006-00 |
| Hard Disk(40G) | 517-20047-00 |
| KIT,Manometer Grounding | 210-12205-00 |
| 14' Monitor- operator | 934-16004-00 |
| 15' Monitor- Engineering | 518-13709-00 |
| Power Supply 350W for Computer | 529-03370-00 |
| Alarm speaker | 933-16001-00 |
| Buzzer,safety 24VDC | 577-10584-00 |
| Alarm signal phone system, 24V,pnlmnt,chime | 577-02147-00 |
| UPS,1400VA 900M | 529-00516-00 |
| PCB ASY,ICP PLASMA SENSE | 299-20000-00 |
| 3 Amp fuse,DC power box | 525-01771-00 |
| 4 Amp fuse,DC power box | 525-01771-02 |
| Tactile feedback keypads | 932-18006-00 |
| Solenoid valve(Single) | 914-14010-00 |
| Solenoid valve(Double) | 914-14011-00 |
| ACX controller | 467-02643-00 |
| 60 amp circuit breaker | 933-10009-00 |
| PCB,OPTO-SENSOR | 080-21001-00 |
| 24vdc power supply 4.8A (old type) | 934-13001-00 |
| wafer mapping pcb | 246-21000-00 |
| Fuse 0.5A | 932-22012-00 |
| Fuse 5A | 932-22005-00 |
| nest bearing (smif) | 910-13007-00 |
| shuttle rotate sensor (up) (sensor +cable) | 181-21000-03 |
| shuttle rotate sensor (down) (sensor+cable) | 181-21004-04 |
| VAC Feedthrough,Electric | 141-01000-00 |
| Shuttle up motor | 235-13587-00 |
| Photo sensor | 931-14001-00 |
| Beam sensor kit | 190-24000-00 |
| Magnetic sensor(cass nest cylinder used) | 932-18015-00 |
| Shuttle Flex cable 26pin | 182-64000-00 |
| Laser diode | 263-00629-01 |
| Spring,extension (for AGV) | 482-01643-00 |
| Spring,extemsion(for SMIF) | 482-04219-00 |
| O-ring Holder of cassette door(Long) | 152-00016-00 |
| O-ring Holder os cassette door(Short) | 152-00017-00 |
| Cylinder,Cassette door(Winbond) | 235-01758-00 |
| Valve 3 way(for Cassette door) | 493-00162-00 |
| Cylinder,SMIF(plateform cylinder) | 914-18005-00 |
| Cylinder,AGV(NTC-1) | 400-00778-00 |
| SMIF interface PCB | 255-00233-00 |
| Bellow | 491-01646-00 |
| Center ring(small) | 914-12013-00 |
| Center ring(big) | 914-12014-00 |
| AGV Platform screw | 303-016270-00 |
| Platform o-ring | 913-10053-00 |
| Shuttle rotate motor 450Ncm | 933-14005-00 |
| MOUNT,MOTOR,SHUTTLE LIFT | 303-13507-00 |
| Tylan gauge 1000torr | 916-10005-00 |
| Shuttle drum | 199-52001-00 |
| Auto soft | 914-11013-00 |
| Tylan gauge 100torr(mini-convectron) | 916-10002-00 |
| shuttle board #1 | 181-90000-00 |
| PCA SHUTTLE #2 REV3 | 181-91000-00 |
| KIT,SHUTTLE LIFT MOTOR REPLACE | 235-13587-00 |
| Flag rotation (shuttle) | 141-00040-00 |
| Cassette door up sensor | 182-65000-03 |
| Cassette door O-Ring | 152-00008-00 |
| Cassette present sensor | 302-15864-00 |
| Pin search sensor | 141-00065-00. |
| Strip o-ring holder long | 152-00016-00 |
| strip o-ring holder short | 152-00017-00 |
| Strip o-ring holder long back | 152-00018-00 |
| screw | 915-12002-00 |
| cylinder,Cassette door cylinder | 914-18003-00 |
| Kit,Loadlock, Window | 210-06410-00 |
| Miniconvectron (Loadlock Hardware) | 916-10006-00 |
| Flange | 299-01001-00 |
| Partlow | 934-14007-00 |
| Watlow | 514-04463-00 |
| Gas filter | 914-91002-00 |
| Grease(yellow) | 635-02946-00 |
| Grease(white) | 999-11001-00 |
| Pins,molex | 932-14003-00 |
| Molex | 932-12016-00 |
| Gasket | 456-08133-00 |
| ASSY PNEUMATIC,UPPER(EV VALVE) | 147-01000-00 |
| ASSY PNEUMATIC,LOWER(EV VALVE) | 147-02000-00 |
| Block for paddle adjustment | 303-02690-00 |
| Tool Box | 605-03664-00 |
| Kit,Data shuttle | 235-04870-00 |
| 6" TC wafer kit | 496-06431-00 |
| 8" TC wafer kit | 496-02152-00 |
| CONTACT | 914-15001-00 |
| CONTACT | 487-01817-04 |
| realy board | 255-03993-00 |
| 120/24vac fuse 7.5 amp | 525-00332-00 |
| +- 15 VDC POWER SUPPLY | 934-13002-00 |
| +- 24 Vdc (Power Supplies) | 934-13001-00 |
| ASSY'HOSE,NW50,20 | 491-01646-008 |
| FUSE 10 AMP | 932-22010-00 |
| FUSE 30 AMP | 932-22008-00 |
| FUSE 5A 600 V | 525-03125-00 |
| DC POWER SUPPLY 24VDC 1.2A | 934-13006-00 |
| ANNUAL PM KIT,WAFER ROBOT,ICP | 230-15772-00 |
| ANNUAL PM KIT,PROCESS CHAMBER | 230-15773-00 |
| ANNUAL PM KIT,HEATER BLOCK,ICP | 230-15774-00 |
| ANNUAL PM KIT,SLIT DOOR,ICP | 230-15775-00 |
| ANNUAL PM KIT,SHUTTLE,ICP | 230-15776-00 |
| ANNUAL PM KIT,THERMOCOUPLE,ICP | 230-15777-00 |
| ANNUAL PM KIT,LFTR PIN CYL,ICP | 230-15778-00 |
| SEMI-ANNUAL PM KIT,SLIT DR,ICP | 230-15779-00 |
| SEMI-ANNUAL PM KIT,SHUTTLE,ICP | 230-15780-00 |
| SEMI-ANNUAL PM KIT,PROCS,CHMBR | 230-15781-00 |
| PM KIT,CHMBR CLEAN,ICP | 230-15783-00 |
| SEMI-ANNUAL PM KIT,WFR ROB,ICP | 230-15793-00 |
| KIT,SEMI ANNUAL PM,SGL,STRIP | 230-12610-00 |
| KIT,SEMI ANNUAL PM,DUAL,STRIP | 230-12611-00 |
| KIT,SEMI ANNUAL PM,SGL,ICP | 230-13815-00 |
| KIT,SGL,CHMBR,SEMI ANN ICP PM | 230-13835-00 |
