MKS RPS
Model : ASTRON hfFLOW : 15L
MKS P/N: FI80146, AX7640
OEM P/N : 0190-72072
Details
Up to 15 slm NF3 no Ar operation
8 to 10+ torr operation
Continuous operation
2.6 gpm cooling water
nWarranty: 6 months.
nConsumable parts replacement.
üO-ring, spark plate, ceramic ring, thermal pad, electronics component…etc.
nDamaged anodic film removed and re-anodized for ASTRONs block.
nPCB repair.
nComplete test.
