Configuration :
1. Cassette platform : Standard
2. Cool Down Chamber : Installed , New type
3. Slit door : New type
4. Robot Assy. : Standard, New type
5. Cassette door : 15"
6. RF generator : AE /RFPP X 4
7.  Heat/Cool Block: Heater , New type with Cicular Groove pattern
8. RF Matching box : Trazar AMU 10D X 4
9. Gas: 3 gases with STEC MFC
10. Gas Box : New type