Aspen II Dual ICP - AGV type
Configuration :1. Cassette platform : Cassette Rotation or standar one piece cassette nest
2. Cool Down Chamber : Installed , New type
3. Slit door : New type
4. Robot Assy. : Standard, New type
5. Cassette door : AGV 26"
6. RF generator : AE /RFPP or Adtec X 4
7. Heat/Cool Block: Heater , New type with Cicular Groove pattern or Water coolen plate with Chiller
8. RF Matching box : Trazar AMU 10D X 4
9. Gas: 3 gases or 4 gases
10. Gas Box : New type
11. Rear EMO
12. Cood down chamber with Hindge
13. Remote operator interface.
14. wafer on paddle sensors installed.
15. CE Compliant
Details
