Aspen 2 Dual ICP
Maker : Mattson Serial Number : 902
Application : Asher / Stripper
Model : Aspen 2 ICP
Vintage : 2000
Wafer Size : 4" , 5" ,6" or 8" ( Configured as customer's request)
Details Configuration :
1. Cassette platform : SMIF (can be configured as AGV or open cassette)
2. Cool Down Chamber : Installed , New type
3. Slit door : New type
4. Robot Assy. : Standard, New type
5. Cassette door : 18"
6. RF generator : Adtek X 4
7. Heat/Cool Block: Heater , New type with Cicular Groove pattern
8. RF Matching box : Trazar AMU 10D X 4
9. Gas: 3 gases with STEC MFC
10. Gas Box : New type
